JPH025863U - - Google Patents
Info
- Publication number
- JPH025863U JPH025863U JP8427788U JP8427788U JPH025863U JP H025863 U JPH025863 U JP H025863U JP 8427788 U JP8427788 U JP 8427788U JP 8427788 U JP8427788 U JP 8427788U JP H025863 U JPH025863 U JP H025863U
- Authority
- JP
- Japan
- Prior art keywords
- support plate
- substrate
- board
- swivel table
- positioning member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988084277U JPH0728691Y2 (ja) | 1988-06-25 | 1988-06-25 | 基板搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988084277U JPH0728691Y2 (ja) | 1988-06-25 | 1988-06-25 | 基板搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH025863U true JPH025863U (en]) | 1990-01-16 |
| JPH0728691Y2 JPH0728691Y2 (ja) | 1995-06-28 |
Family
ID=31308973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988084277U Expired - Lifetime JPH0728691Y2 (ja) | 1988-06-25 | 1988-06-25 | 基板搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0728691Y2 (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5397375A (en) * | 1977-02-07 | 1978-08-25 | Nissin Electric Co Ltd | Device for producing semiconductor |
| JPS59170959U (ja) * | 1983-05-02 | 1984-11-15 | 日新電機株式会社 | イオン注入装置 |
| JPS60216543A (ja) * | 1984-04-11 | 1985-10-30 | Nissin Electric Co Ltd | ウエハのデイスクへの装着機構 |
-
1988
- 1988-06-25 JP JP1988084277U patent/JPH0728691Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5397375A (en) * | 1977-02-07 | 1978-08-25 | Nissin Electric Co Ltd | Device for producing semiconductor |
| JPS59170959U (ja) * | 1983-05-02 | 1984-11-15 | 日新電機株式会社 | イオン注入装置 |
| JPS60216543A (ja) * | 1984-04-11 | 1985-10-30 | Nissin Electric Co Ltd | ウエハのデイスクへの装着機構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0728691Y2 (ja) | 1995-06-28 |